THREE-DIMENSIONAL ACCELERATION SENSOR

摘要

PURPOSE:To simplify a structure to reduce a cost by preventing the breakage of a cantilever during a wafer process through constituting the cantilever on one chip and by providing an air-damping system through forming a narrow gap easily and with good controllability. CONSTITUTION:In a three-dimensional acceleration sensor comprising three detecting elements formed in a semiconductor substrate 10 for the purpose of detecting a three-dimensional acceleration, respective detecting elements are constituted by cantilevers 100, 200 and 300 functioning as piezoresistances.