APPARATUS FOR INSPECTING TRANSPARENT MOLD IC

摘要

PURPOSE:To provide the title apparatus capable of automating the inspection of the appearance of a transparent mold IC. CONSTITUTION:An oblique illumination part 6, a vertical illumination part 7 and a transmission illumination part 8 are successively changed over by an illumination change-over part 13 to illuminate a transparent mold IC 1 in every direction and the respective images of said IC are taken by a television camera 5 through a microscope 3. The obtained images are processed by an image processing part 10 through an image memory 9 and the quality of the transparent mold IC is judged based on the processed images by a judging part 11 to obtain a judgment result signal 12. Therefore, the surface or interior flaw of the transparent mold IC can be automatically and accurately inspected.