METHOD FOR PLASMA-CLEANING SUBSTRATE SURFACE,申请号JP19910108905-传众专利搜索

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发明名称	METHOD FOR PLASMA-CLEANING SUBSTRATE SURFACE
摘要
申请公布号	JPH04314864(A)	申请公布日期	1992.11.06
申请号	JP19910108905	申请日期	1991.04.12
申请人	NIPPON SHEET GLASS CO LTD	发明人	OGINO ETSUO;NAKAI HIDEMI
分类号	C23C14/02;C23C16/02;H05H1/10	主分类号	C23C14/02
代理机构		代理人
主权项
地址

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