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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04316331(A)
申请公布日期
1992.11.06
申请号
JP19910082748
申请日期
1991.04.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHIMIZU MASAHIRO
分类号
H01L21/28;H01L21/304;H01L21/336;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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