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发明名称
FORMATION METHOD OF INTERCONNECTION
摘要
申请公布号
JPH04313222(A)
申请公布日期
1992.11.05
申请号
JP19910104616
申请日期
1991.04.10
申请人
SONY CORP
发明人
SUMI HIROBUMI
分类号
H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/52;H01L23/522
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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