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发明名称
DESIGN RULE CHECK DEVICE FOR HIERARCHICAL LAYOUT PATTERN
摘要
申请公布号
JPH04313163(A)
申请公布日期
1992.11.05
申请号
JP19910074861
申请日期
1991.04.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
KINOSHITA NOBUKO
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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