| 摘要 |
<p>PURPOSE:To provide a manufacturing method which can control the tension of a membrane freely when the membrane for an X-ray mask is formed so as to, for instance, give a tensile tension to the membrane showing a compression tension at the time of film forming or relieve the tension of the membrane showing a high tensile tension at the time of film forming. CONSTITUTION:A rear membrane 2b is formed on the rear of a substrate and then a surface membrane 2a is formed. After that, the rear membrane 2b is etched.</p> |
