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经营范围
发明名称
CLEANING APPARATUS
摘要
申请公布号
JPH04313227(A)
申请公布日期
1992.11.05
申请号
JP19910078793
申请日期
1991.04.11
申请人
HITACHI LTD
发明人
YAMAMOTO SATORU;NAKAGAWA KIYOSHI;YUI HAJIME
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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