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发明名称
FORMATION OF INTERCONNECTION
摘要
申请公布号
JPH04313255(A)
申请公布日期
1992.11.05
申请号
JP19910104617
申请日期
1991.04.10
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
H01L21/285;H01L21/28;H01L21/302;H01L21/3065;H01L21/768
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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