| 摘要 |
PURPOSE:To obtain the process for producing the optical waveguide parts which facilitates the connection to optical fibers and can enhance the reliability of a juncture. CONSTITUTION:This process is constituted by including a stage for forming a low-refractive index layer 4 and a high-refractive index layer 6 in this order on an Si substrate 2, a stage for partially removing the high-refractive index layer to form a V-groove forming region so that the thickness of the low- refractive index layer in this region is nearly equal to the thickness of the high-refractive index layer, a stage for forming a 1st mask pattern 10 for an optical waveguide on the high-refractive index layer and removing the region of the width equidistant from the extension line of the 1st mask pattern on the V-groove forming region to form a 2nd mask pattern 12, a stage for forming a waveguide core 60 by etching and removing the prescribed part of the low- refractive index layer to expose the Si substrate, and a stage for etching the exposed Si substrate to form the V-groove 14. |
