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发明名称
ZUSAMMENSETZUNG UND VERFAHREN ZUR DARSTELLUNG VON METALLOXID-GEMISCHEN.
摘要
申请公布号
DE3875010(D1)
申请公布日期
1992.11.05
申请号
DE19883875010
申请日期
1988.07.29
申请人
MITSUBISHI MATERIALS CORP., TOKIO/TOKYO, JP
发明人
TSUNASHIMA, MAKOTO, TOKYO, JP;UCHIDA, HIROTO;SAKAI, KAZUHIRO;MIYAUCHI, MASATO, OMIYA-SHI SAITAMA-KEN, JP
分类号
C04B35/45;C04B35/636;H01L39/24;(IPC1-7):C04B35/00;H01L39/12;C01G3/00;C23C18/12
主分类号
C04B35/45
代理机构
代理人
主权项
地址
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