Optical inspection apparatus.

摘要

An optical projection system for projecting a magnified image of an object includes a 1:2 relay lens (18) having a magnification of x0.5. The object (12) is illuminated by a collimated substantially parallel light beam from a source (10) and the 1:2 relay lens (18) produced an intermediate shadow image (19) at its focal plane. A projection lens (20) is located to project a magnified final image (16) of the intermediate image (19) on the screen (17). While it is preferred that the relay lens has a magnification of x0.5, the relay lens may have a different magnification less than x1. <IMAGE>