Nickel, Chromium, Iron Alloy Type Susceptor Structure

摘要

A susceptor includes a substrate and a metal layer coupled to the substrate. An adhesive layer is coupled to the metal layer and a support layer is coupled to the adhesive layer for supporting the susceptor structure. The metal layer includes nickel, chromium and iron each comprising a percentage of the metal layer approximately within the following ranges: nickel is 60% to 68%; chromium is 5% to 37%; and iron is 3% to 38%.