发明名称 |
Wet etching of cured polyimide. |
摘要 |
<p>Polyimide is etched by contacting the polyimide with an aqueous solution of a metal hydroxide followed by contact with an acid followed by contact with an aqueous solution of a metal hydroxide. Etching of chemically cured polyimide can be enhanced by employing a presoaking in hot water. Also, partially etched chemically cured polyimide is removed with a concentrated acid solution. In preparing a metal coated polyimide structure for subsequent gold plating, two flash etching steps with the polyimide etch between are employed after developing the photoresist.</p> |
申请公布号 |
EP0511691(A2) |
申请公布日期 |
1992.11.04 |
申请号 |
EP19920112218 |
申请日期 |
1989.07.03 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BARD, STEVEN L.;FEGER, CLAUDIUS;GLENNING, JOHN J.;HOUGHAM, GARETH G., DR.;MOLIS, STEVEN E. |
分类号 |
C08J7/12;H01L21/311;H01L21/48;H05K1/03;H05K3/00;H05K3/10 |
主分类号 |
C08J7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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