| 发明名称 |
MANUFACTURE AND MANUFACTURING DEVICE FOR SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To facilitates the stage replacement in the units of packages when manufacturing a semiconductor device. CONSTITUTION:Half-finished semiconductor devices are stored in a pallet 21 which has outside dimensions unified for the kind of the semiconductor device. The devices in the pallet are taken in a processor 30. After processed in the processor 30, the semiconductor device in the pallet are discharged. |
| 申请公布号 |
JPH04312952(A) |
申请公布日期 |
1992.11.04 |
| 申请号 |
JP19910143318 |
申请日期 |
1991.06.14 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
KOBAYASHI KUNIO;SHIGETOMO KUNIHIRO;IMANAKA SEIJI;TAKAMURA JIRO |
| 分类号 |
B65D85/86;B65D85/38;B65G47/74;H01L21/50;H01L21/673;H01L21/677;H01L21/68;H01L23/00;H05K13/00 |
主分类号 |
B65D85/86 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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