| 摘要 |
<p>PURPOSE:To improve performance and quality by removing an oxide film formed by anode oxidation on the cone surface of a metal formed on an insulating base from the cone surface in a solution, and subjecting the metal to electric protection treatment to form an emitter tip. CONSTITUTION:On an insulating base 1, a metal 2, an insulating film 5, and a resist mask 6 are successively formed followed by etching (Eg) to form an insulating mask pattern (MP) 5'. Then, a cone 20 is formed below the MP 5', the metal 2 is anode-oxidized in a phosphoric acid aqueous solution to form an oxide film 3, and a gate insulating film 7 and a gate metal film 8 are continuously formed thereon. Then, the MP 5' is selectively etched to expose the space around an emitter tip (ET) forming part 21'. Successively, the film 3 on the cone side surface part is made to a cathode in a high temperature NaOH aqueous solution followed by electric protection treatment, dissolved and removed to form the ET 21 of the metal 2 on the base 1. Then, the film 8 on the film 7 is pattern-etched to form a gate electrode 80. Thus, the performance and quality are improved.</p> |
