MANUFACTURE OF THIN FILM,申请号JP19910075072-传众专利搜索

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发明名称	MANUFACTURE OF THIN FILM
摘要
申请公布号	JPH04311555(A)	申请公布日期	1992.11.04
申请号	JP19910075072	申请日期	1991.04.08
申请人	SEIKO EPSON CORP	发明人	IWASHITA SETSUYA;NATORI EIJI;KAMIKAWA TAKETOMI
分类号	C23C14/06;C23C14/14;C23C14/24	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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