| 发明名称 |
ARC-MAGNETRON AND THE METHOD OF COATING |
| 摘要 |
An arc magnetron is described in which an edge magnet arrangement is displaceable in the axial direction relative to a preferably fixedly mounted center pole permanent magnet so that a cathode sputtering process and/or an arc discharge process can be realized in dependence on the relative position of the edge magnet arrangement and the center pole magnet.
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| 申请公布号 |
US5160595(A) |
申请公布日期 |
1992.11.03 |
| 申请号 |
US19910701388 |
申请日期 |
1991.05.16 |
| 申请人 |
HAUZER HOLDING B.V. |
发明人 |
HAUZER, FRANSISCUS J. M.;MUENZ, WOLF-DIETER;BUIL, BOUDEWIJN J. A. M.;SCHULZE, DIETMAR;TIETEMA, ROEL |
| 分类号 |
C23C14/32;C23C14/35;C23F4/00;H01J37/34 |
主分类号 |
C23C14/32 |
| 代理机构 |
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