发明名称 Semiconductor device with composite surface insulator
摘要 A semiconductor device comprises a substrate, first insulation layers formed on the substrate, and a second insulation layer formed on the substrate. The second insulation layer, which acts as a dielectric material of a capacitor component of the semiconductor device, is thinner than each of the first insulation layers.
申请公布号 US5160988(A) 申请公布日期 1992.11.03
申请号 US19910657934 申请日期 1991.02.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HIGUCHI, TAKAYOSHI;SUGIURA, SOUICHI
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
代理机构 代理人
主权项
地址