发明名称 |
High-efficiency, multilevel, diffractive optical elements |
摘要 |
A high-efficiency, diffractive optical element having at least one surface including multilevel steps, the steps determined by calculating equiphase boundaries utilizing a disclosed equation and algorithm. The optical element can be adapted to correct for chromatic and/or spherical aberration, and can be used in UV lithographic apparatus.
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申请公布号 |
US5161059(A) |
申请公布日期 |
1992.11.03 |
申请号 |
US19890399848 |
申请日期 |
1989.08.29 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
SWANSON, GARY J.;VELDKAMP, WILFRID B. |
分类号 |
G02B3/08;G02B5/18;G02B27/44;G03F1/14;G03F7/00;G03F7/20 |
主分类号 |
G02B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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