摘要 |
PURPOSE:To enhance a superconductor film, which is formed on a region adjacent to a non-superconductor thin film which forms the tunnel junction of a tunnel junction element, in film properties. CONSTITUTION:A first oxide superconductor thin film 2, a first composite oxide thin film 3, a non-superconductor thin film 4, a second composite oxide thin film 5, and a second superconductive thin film 6 are successively laminated on a substrate 1, where the first and the second composite oxide thin film are formed of composite oxide composed of La, Ca, and Mn of perovskite crystal structure.
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