| 发明名称 |
MANUFACTURING METHOD OF CHALCOPYRITE THIN FILM AND THIN FILM SOLAR CELL |
| 摘要 |
PURPOSE:To obtain a method for forming a chalcopyrite thin film excellent in orientation in a specified region of a conducting thin film. CONSTITUTION:As the pretreatment of a process for forming a chalcopyrite thin film 4, the surface of a substrate or a thin film 2 is turned into an amorphous state 3, on which a chalcopyrite thin film 4 is formed. |
| 申请公布号 |
JPH04309238(A) |
申请公布日期 |
1992.10.30 |
| 申请号 |
JP19910075381 |
申请日期 |
1991.04.08 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
TERAUCHI MASAHARU;HIRAO TAKASHI |
| 分类号 |
H01L21/363;H01L31/04 |
主分类号 |
H01L21/363 |
| 代理机构 |
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