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发明名称
摘要
申请公布号	JPH04121760(U)	申请公布日期	1992.10.30
申请号	JP19910026313U	申请日期	1991.04.18
申请人		发明人
分类号	H01L21/52;H01L31/12;(IPC1-7):H01L31/12	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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