ION BEAM NEUTRALIZING DEVICE,申请号JP19910071537-传众专利搜索

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发明名称	ION BEAM NEUTRALIZING DEVICE
摘要
申请公布号	JPH04308637(A)	申请公布日期	1992.10.30
申请号	JP19910071537	申请日期	1991.04.04
申请人	MATSUSHITA ELECTRON CORP	发明人	UCHIYAMA MASAO
分类号	C23C14/48;H01J37/06;H01J37/317;H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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