| 摘要 |
A surface mountable piezoelectric device that includes an in situ finish plate mask is mounted on a substrate (20) that includes feedthrough holes (26, 28 and 30) to conduct signals from a piezoelectric element (40) that may include multiple resonator stages (48, 46, 50 and 56). A metallic support structure (70), which acts as a finish plate mask, includes windows or holes therethrough (72, 74 and 76) permits tuning of the piezoelectric device by mass loading during manufacturing, compliantly supports the piezoelectric element (40), provides RF shielding for the resonators, and is an in situ finish plate mask. |
