| 摘要 |
<p>An automatic wafer (12) handling system utilizing a vacuum pneumatic controlled cable driving mechanism (42, 44). In principle, the necessary movements are provided by air cylinder (36) actuation of pulley supported cables (42). This application of vacuum force is substituted in place of positive air pressure, offering simplicity, reliability and stability by its use. Further advantages include the elimination of electric motor driving elements, thereby providing significant reduction of particulate and dust contamination problems. System operation includes the use of vacuum in the pickup of wafers, in manipulation and transport by cable drive, and motion control by means of air cylinders using negative air pressure.</p> |
