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发明名称
CLEANING JIG AND LIFTING UP METHOD THEREOF
摘要
申请公布号
JPH04306833(A)
申请公布日期
1992.10.29
申请号
JP19910070225
申请日期
1991.04.03
申请人
HITACHI LTD
发明人
MIYAGUCHI TAKASHI;TAKAHASHI TOMOJI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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