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发明名称
MANUFACTURE OF THREE-LAYER-STRUCTURE FILM CARRIER
摘要
申请公布号
JPH04307746(A)
申请公布日期
1992.10.29
申请号
JP19910099646
申请日期
1991.04.04
申请人
CHISSO CORP
发明人
FURUKAWA HIDENORI;TOKUNAGA SHIGENORI;TAKAHASHI AKIO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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