发明名称 DETECTION SYSTEM FOR PAD CENTER POINT AND CHIP REFERENCE POINT
摘要 PURPOSE:To accurately detect the center point in a circular pad and the chip reference point. CONSTITUTION:The chip reference point is detected by repeating a series of the processing of providing a window 5 for a section of checkered array of a circular pad 2 in the camera center of the image pickup device, binarizing the video within this window 5, scanning the video in the vertical direction and horizontal direction of the checker, detecting the center point of the circular pad 2 within the window 5 to determine the positions in the vertical direction and horizontal direction that the value of this scanning result becomes maximum and moving the camera center only for the space of the circular pad 2 in the vertical direction or in the horizontal direction from this point. Thus, the detection of accurate reference point can be performed without much being influenced by dust, etc.
申请公布号 JPH04307677(A) 申请公布日期 1992.10.29
申请号 JP19910099493 申请日期 1991.04.04
申请人 HITACHI ELECTRON ENG CO LTD 发明人 IIJIMA HIROYASU;KATO KATSUHIKO
分类号 H01L21/68;G06T1/00;H04N7/18 主分类号 H01L21/68
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