| 摘要 |
<p>PURPOSE: To simplify the effective part of a sensor chip, i.e., a diaphragm, a sensor resistor, a conductor path and a sensor chip, by overcoming the drawback of conventional technology that the electrical connection path with a connection pin is susceptible to external effect. CONSTITUTION: A silicon chip 10 constitutes a unit along with a glass support 15 and the unit is fixed onto a casing through a connection pin for electrical contact connection of the silicon chip. The glass support 15 plunges into a through hole according to the arranging pattern of connection member 18 of a casing 17. The connection pin 18 plunges into the through hole. The through hole is filled with a conductive paste 21 which makes electrical contact connection between the silicon chip 10 and the connection pin 18 of the casing 17.</p> |
