| 摘要 |
PURPOSE:To apply laser beams without considering the irregularities of a free level when laser lithography is executed by applying laser beams from the inside and surface of a photo-setting resin and curing the photo-setting resin in the liquid. CONSTITUTION:The level 33 of a photo-setting resin liquid is elevated while the level of the resin liquid is exposed to laser beams 32 in a level elevation method by a free level, thus successively laminating resin cured substances 34 gradually to an upper section. A transparent plate 52 is held at a regular interval in the liquid on a vertically movable base plate 51, and the base plate 51 is lowered while the transparent plate 52 is exposed by laser beams 53 from the upper section of the transparent plate 52 in a work sinking method by a regulated level, thus successively laminating resin cured substances 54 gradually to a lower section. |
