HIGH-RESOLUTION VISUAL APPARATUS FOR PART INSPECTION

摘要

PURPOSE: To facilitate inspection and decision by comparing shape data on a component with data on a reference component. CONSTITUTION: The shape of the component 11 observed by a component sensor 16 of high resolution which inspects the component in detail are inspected by being compared with the stored size shape of the reference component. Further, the component sensor 16 has high resolution in either direction of an X and a Y axis. The data on the reference component obtained by the CCD of the component sensor 16 are stored in abbreviated format. The silhouette of the component 11 is utilized for plural kinds of inspection to enable more accurate inspection.