| 摘要 |
<p>An inspecting apparatus is provided by which a cross section of a semiconductor device to be inspected can be easily obtained. The inspection apparatus includes a first microscope (110) for specifying a portion where the inspection of a cross section is to be effected, a rotary grinder (140) for grinding the portion specified by the first microscope (110), a second microscope (120) for monitoring the portion ground by the rotary grinder (140), and a stage (130) for fixing the semiconductor device movable relative to the first and second microscopes (110 and 120) and the rotary grinder (140). <IMAGE></p> |
