DEVICE FOR ION PLASMA MACHINING SURFACE OF WORK

摘要

PURPOSE: To enable low energy to effectively execute processing requiring the effect of a high strength single motion beam by decelerating ion flow by an electric field which is generated adjacently to a workpiece surface and counters the ion flow with an apparatus for ion-plasma machining the workpiece surface. CONSTITUTION: The apparatus has a vacuum chamber 1 having an ion flow source 2 which is a orientated toward the surface of the workpiece 4 to be machined and a system 3 for decelerating the ion flow by closed electron drift flow. The system 3 has a shielding electrode 5 which has a hole for the passage of the ion flow to a machining region, a decelerating electrode 6 which is insulated from the wall of the vacuum chamber 1 and the shielding electrode 5 and is made from nonmagnetic material and a magnetic system consisting of at least a pair of magnetic elements 7. The decelerating electrode 6 is installed between the magnetic elements 7 and at least one workpiece 4 to be machined is mounted at the same. The magnetization vectors (M→) of each pair of the magnetic elements 7 are orientated relative to each other and to the surface of the decelerating electrode 6 so that the vector (B→) of magnetic induction is parallel with the surface of the decelerating electrode 6.