| 摘要 |
PURPOSE:To obtain an apparatus which can detect leakage of a gas utilizing a gas spillage phenomenon of a pressure adjuster. CONSTITUTION:In a gas spillage phenomenon preventer of a pressure adjustor 2, a gas piping 3 between a high pressure gas supply source and a pressure adjuster 2 for pressure reduction is made as double pipe of an inner tube 3a and an outer tube 3b and an interval maintaining device 8 is inserted between the inner and outer tubes. Any one of the tubes is fed with a high pressure supply gas while the other with a heated inert gas and the high pressure supply gas is heated. Thus, it is detected whether the high pressure supply gas is leaked into the inert gas. |
