Planar self-electro-optical effect device.

摘要

By implanting contacts to a p-layer (17) buried beneath the quantum wells (16), a SEED can be fabricated which is substantially planar, free of mesa sidewalls, and has enhanced performance characteristics as compared with the conventional mesa SEED. The SEED is substantially planar in that it contains no semiconductor surface in the region of the photodiodes (11,12) within about a micrometer thereof) that rises more than about 3000 angstroms from the uppermost continuous semiconductor surface. Indeed, with the disclosed structure the highest such region can be only a few hundred microns above the continuous surface. The SEED is free of sidewalls in that no outer surface of the semiconductor material contains any surface region of the active portion of the quantum well structure. Moreover the resulting SEED has a topography well suited for integration with other electronic components. <IMAGE>