| 摘要 |
<p>PURPOSE:To provide a wafer carrier transfer device having such features as the capability of reducing the number of drive shafts, compared with the case of a conventional device, lowering a dirt generation amount and manufacture cost, allowing the application of compact design, ensuring safety for preventing a travel outside the predetermined track and simplifying a drive control system. CONSTITUTION:A base 2 of a wafer carrier transfer device 1 is provided with a drive motor 3 and a rotation transmission mechanism 4, and constitution is so made as to transfer a driving force via a pulley 5, a timing belt 6 and a pulley 7. A drive arm 8 is connected to the rotary shaft of the rotation transmission mechanism 4. Furthermore, the base 2 is provided with an engagement member 11 constituted in such a way as linearly movable in 8 vertical direction via a guide 10, and a carrier holding arm 12 is so coupled to the engagement member 11 as to be freely rotatable. A carrier retaining section 14 for holding a wafer carrier 13 is fitted to the end of the carrier holding arm 12, and the end of the drive arm 8 is so jointed to the intermediate section of the carrier holding arm 12 as to be freely rotatable.</p> |
