METHOD AND APPARATUS FOR MEASURING PATTERN DIMENSION,申请号US19910651795-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEASURING PATTERN DIMENSION
摘要
申请公布号	US5159643(A)	申请公布日期	1992.10.27
申请号	US19910651795	申请日期	1991.02.07
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	KAGA, YASUHIRO;KOMATSU, FUMIO
分类号	G01B15/00	主分类号	G01B15/00
代理机构		代理人
主权项
地址

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