APPARATUS AND METHOD FOR DISCHARGING A SPECIMEN DISPOSED IN AN EVACUATED CHAMBER

摘要

In order to be able to investigate non-conductive specimens in an electron beam apparatus in a charge-neutral manner, a charge applied by the scanning electron beam is neutralized with the assistance of charge carriers present in a metal plasma. The plasma is generated by a gas discharge between two electrodes positioned with the vacuum specimen chamber of the electron beam apparatus. One of these electrodes has a layered structure (e.g. metal-insulator-metal) that facilitates the ignition of the gas discharge by means of a high-voltage pulse.