| 摘要 |
PURPOSE:To contrive the reduction of cost and time for detection and perform the accurate detection of flaws of an object to be inspected. CONSTITUTION:A buffer 7 for detection having a buffer head 1 on a frame which runs upward and downward, right and left is mounted through a three- dimensional movable manipulator 17, and the distance between the buffer head 1 and an object 18 to be detected is held constant by the use of feedback control on the basis of a detection result from a distance detection sensor 4. In addition, sponges 5, 6 are attached to a base 3 of the buffer head 1 and the detection point is rubbed by the sponge 5. Thereby the detection of the face can be performed without any restriction of a face shape of the object 18 to be detected and the precision of detection data can be heightened because noise produced by bubbles is prevented. |
