发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND ALIGNING METHOD
摘要 PURPOSE:To provide the photosensitive resin composition and aligning method to allow easy aligning with an exposing device having an optical aligning function. CONSTITUTION:The photosensitive resin compsn. to be used with the exposing device having the optical aligning function is constituted by incorporating a dye which absorbs the light of the same wavelength as the wavelength of the light used for aligning of the exposing device into this compsn. The dependency of the signal processing of the optical aligning on substrate materials is offset by using such photosensitive resin compsn.
申请公布号 JPH04304459(A) 申请公布日期 1992.10.27
申请号 JP19910092648 申请日期 1991.04.01
申请人 CANON INC 发明人 MAEHARA HIROSHI
分类号 G03F9/00;H01L21/027 主分类号 G03F9/00
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