MICROWAVE SPUTTERING METHOD AND DEVICE FOR DEALING WITH BAND-SHAPED MEMBER,申请号JP19910089344-传众专利搜索

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发明名称	MICROWAVE SPUTTERING METHOD AND DEVICE FOR DEALING WITH BAND-SHAPED MEMBER
摘要
申请公布号	JPH04304365(A)	申请公布日期	1992.10.27
申请号	JP19910089344	申请日期	1991.03.29
申请人	CANON INC	发明人	ECHIZEN YUTAKA
分类号	C23C14/34;H01L21/203	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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