SEMICONDUCTOR THIN-FILM MANUFACTURING APPARATUS,申请号JP19910093402-传众专利搜索

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发明名称	SEMICONDUCTOR THIN-FILM MANUFACTURING APPARATUS
摘要
申请公布号	JPH04303921(A)	申请公布日期	1992.10.27
申请号	JP19910093402	申请日期	1991.03.30
申请人	KOBE STEEL LTD	发明人	MATSUI YUICHI
分类号	C23C14/50;H01L21/203	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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