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发明名称
TARGET FOR SPUTTERING
摘要
申请公布号
JPH04304368(A)
申请公布日期
1992.10.27
申请号
JP19910094800
申请日期
1991.04.01
申请人
ALPS ELECTRIC CO LTD
发明人
KAKIHARA YOSHINOBU
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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