| 摘要 |
<p>PURPOSE:To carry out quantative diagnosis magnetron discharge plasma by meauring the illumination intensity of plasma from two waay directions, and reconstructing the illimination distribution obser inside observation surface by the CT technology method with the use of measured data. CONSTITUTION:Indide a vacuum chamber 1, parallel electrode plates 2, 3 are arranged and observation apertures 4, 5 are aet in normanl direction to each other. A mirror box 12 capable of rotating is disposed at positions corresponding to the apertures 4, 5 to decide an optical path and connected to obtical fiber. The box 12 is on a stage capable of moving in the lingitudinal direction and in parallel with the surface of apertures 4, 5, the stage is used for CT measurement. In order to grasp the space dischage structure of magnetron discharge plasma, the three dimensional distribution of illumination with the application of CT technology method os measured from the scanning measurement from two observation positions 4, 5. As a result, it is found that the measurement is much concerned with the distrubution of magnetic fieled in association with magnetron. It is thus possible to perform plasma control so as to improve the yielding rate of products.</p> |
