| 摘要 |
PURPOSE:To securely recognize the position of a recognition mark. CONSTITUTION:An image signal by color photographed by means of a CCD camera 10 is converted into a digital signal by means of an A/D conversion circuit 13, the maximum difference of the signal intensity is extracted according to the presence of a recognition mark S among the respective image signals by color of R, G, B by means of a CPU15, and the position of the recognition mark S is recognized on the basis of the image signal where the signal intensity is maximum. This constitution allows correct recognition of the position of a substrate 9. |
