| 摘要 |
PURPOSE: To obtain an accelerometer having small irregularity with low-cost manufacture by improving the sensitivity, and providing a sensor circuit having the stoutness durable against accelerating power to compensate the power displaced out of an axis. CONSTITUTION: A mass 18 of the part of a semiconductor member 14 made of silicon substance is supported by a plurality of integral member beams 24 so that the mass can move to the support in response to the acceleration of the member. Tapered beam sections 24.3, 24.4 are provided at the respective beams. Piezo resistance sensors 26 are laminated near the centers of the sections, and coupled as a bridge circuit. The selection of the shape of the beam and the formation of the bridge are conducted so that uniform strains are generated at the beams and the influence of the power out of the axis is reduced. |
