| 摘要 |
PURPOSE:To enhance sensitivity, remaining film endurance, resolution, and dimension controllability by incorporating a mixture of the esters between the hydroxides of a specified phenol compound and quinonediazidosulfonic acid and between these hydroxides and sulfonic acid and/or carboxylic acids as a photosensitive agent. CONSTITUTION:An alkali-soluble phenol resin, and a mixture of the hydroxyl groups of one of the phenol compounds represented by formulae I esterified by the quinonediazido sulfonic acid and those esterified by sulfonic acid represented by formula II: -OSO2R<9> and/or esterified by carboxylic acid represented by formula III: -OCOR<10> are incorporated as the photosensitive agent. In formulae I-III, A is optionally substituted alkylene, or the like; (n) is 0 or 1; each of R<1>-R<8> is H, halogen, OH, 1-4C alkyl, or the like; and each of R<9> and R<10> is optionally substituted alkyl or the like. |
