| 摘要 |
PURPOSE:To offer a method for manufacturing a transparent electrical conductive film keeping oxygen therein into a stable state and improving its electric conductivity. CONSTITUTION:Powder to form the material for a transparent electrical conductive film is melted by plasma, and this melt is sprayed on a substrate 1 to form a transparent electrical conductive film 2. After that, plasma is generated in an oxygen atmosphere, and heat treatment is executed to replenish the grain boundary 4 of the transparent electrical conductive film 2 with oxygen. |
