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发明名称
摘要
申请公布号
JPH04118554(U)
申请公布日期
1992.10.23
申请号
JP19910021582U
申请日期
1991.04.04
申请人
发明人
分类号
C23C14/30;H01J37/06;(IPC1-7):H01J37/06
主分类号
C23C14/30
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代理人
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